Generation 2 vacuum ironless linear motor series is designed with the unique challenges of vacuum applications in mind and based on years of collaboration with high-end semiconductor manufacturers. The portfolio is suitable for even the strictest vacuum requirements with a large force range.
The production process can be affected by the outgassing of the motion system. The vacuum ironless linear motors are specially designed coil units and magnetic yokes for use in high vacuum, up to 10-8 mbar, and offer the lowest achievable outgassing for a series product.
The importance of low outgassing can be crucial for certain applications, that Tecnotion had this thoroughly tested and the support team can supply you with exact specifications and performance details.
The production process can be affected by the outgassing of the motion system. The vacuum ironless linear motors are specially designed coil units and magnetic yokes for use in high vacuum, up to 10-8 mbar, and offer the lowest achievable outgassing for a series product.
The importance of low outgassing can be crucial for certain applications, that Tecnotion had this thoroughly tested and the support team can supply you with exact specifications and performance details.
To minimize the chance of unwanted chemical reactions or pollution of the process or surrounding equipment, more and more high-tech applications require vacuum solutions, such as
One of the biggest challenges in a vacuum environment is heat transfer and motion. The closed design of the Generation 2 vacuum motors is optimized for low heat dissipation and optimal mounting. These features allow an easy system design that is suited for the integration of multiple motors in one system.
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